====== Fe (5000) into Layer 1                   =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Fe   Energy = 5000  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     5.E+04 A   Layer # 1- Density = 3.668E22 atoms/cm3 = 4.81 g/cm3
  Layer # 1- Se = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =1000.00
 Ion Average Range =   278.2E+02 A   Straggling =   531.2E+01 A
 Ion Lateral Range =   525.5E+01 A   Straggling =   645.6E+01 A
 Ion Radial  Range =   814.5E+01 A   Straggling =   426.9E+01 A
====================================================================
 Range Skewne- = -001.0535  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 004.7332  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Fe         Se    
   (Ang.)       Ions     Tgt. Atoms
-----------  ----------  ----------
500010.E-03  0.0000E+00  1.6158E+07
100001.E-02  0.0000E+00  1.9857E+07
150001.E-02  0.0000E+00  1.9635E+07
200001.E-02  0.0000E+00  2.0598E+07
250001.E-02  2.0000E+02  1.9096E+07
300001.E-02  0.0000E+00  2.2201E+07
350001.E-02  0.0000E+00  2.3373E+07
400001.E-02  2.0000E+02  2.2246E+07
450001.E-02  2.0000E+02  2.2945E+07
500001.E-02  0.0000E+00  2.7468E+07
550001.E-02  2.0000E+02  2.5912E+07
600001.E-02  2.0000E+02  2.3633E+07
650001.E-02  0.0000E+00  2.6210E+07
700001.E-02  0.0000E+00  2.3773E+07
750001.E-02  2.0000E+02  2.4734E+07
800001.E-02  2.0000E+02  2.6156E+07
850001.E-02  0.0000E+00  2.8478E+07
900001.E-02  2.0000E+02  2.9562E+07
950001.E-02  0.0000E+00  2.8625E+07
100000.E-01  2.0000E+02  3.2756E+07
105000.E-01  0.0000E+00  3.6665E+07
110000.E-01  6.0000E+02  3.8845E+07
115000.E-01  4.0000E+02  3.6877E+07
120000.E-01  0.0000E+00  3.8422E+07
125000.E-01  4.0000E+02  3.8575E+07
130000.E-01  4.0000E+02  4.4610E+07
135000.E-01  2.0000E+02  3.9507E+07
140000.E-01  6.0000E+02  3.9152E+07
145000.E-01  1.4000E+03  4.5534E+07
150000.E-01  2.0000E+02  4.1903E+07
155000.E-01  1.0000E+03  4.3056E+07
160000.E-01  4.0000E+02  4.0233E+07
165000.E-01  1.6000E+03  4.4687E+07
170000.E-01  4.0000E+02  4.9258E+07
175000.E-01  1.0000E+03  5.0227E+07
180000.E-01  6.0000E+02  5.2318E+07
185000.E-01  1.8000E+03  5.2285E+07
190000.E-01  1.4000E+03  5.8730E+07
195000.E-01  6.0000E+02  5.7976E+07
200000.E-01  4.0000E+02  5.2911E+07
205000.E-01  8.0000E+02  5.7204E+07
210000.E-01  2.6000E+03  6.2486E+07
215000.E-01  2.6000E+03  6.4047E+07
220000.E-01  2.8000E+03  6.7559E+07
225000.E-01  3.0000E+03  7.2528E+07
230000.E-01  3.2000E+03  7.6804E+07
235000.E-01  4.2000E+03  7.2042E+07
240000.E-01  3.8000E+03  7.8865E+07
245000.E-01  5.4000E+03  7.6004E+07
250000.E-01  6.2000E+03  7.1332E+07
255000.E-01  4.8000E+03  7.7751E+07
260000.E-01  6.4000E+03  8.9884E+07
265000.E-01  6.8000E+03  9.0918E+07
270000.E-01  8.8000E+03  7.9784E+07
275000.E-01  6.6000E+03  7.4556E+07
280000.E-01  6.8000E+03  7.1833E+07
285000.E-01  8.0000E+03  7.2017E+07
290000.E-01  1.0200E+04  7.1970E+07
295000.E-01  7.8000E+03  6.6170E+07
300000.E-01  8.4000E+03  6.0422E+07
305000.E-01  7.8000E+03  5.0311E+07
310000.E-01  7.8000E+03  5.2252E+07
315000.E-01  9.0000E+03  4.6291E+07
320000.E-01  9.2000E+03  3.6882E+07
325000.E-01  9.4000E+03  3.9036E+07
330000.E-01  5.0000E+03  2.2894E+07
335000.E-01  5.4000E+03  2.2943E+07
340000.E-01  5.2000E+03  2.0151E+07
345000.E-01  3.6000E+03  1.3356E+07
350000.E-01  3.8000E+03  1.0584E+07
355000.E-01  1.8000E+03  7.3308E+06
360000.E-01  3.0000E+03  5.5692E+06
365000.E-01  2.4000E+03  5.8830E+06
370000.E-01  1.2000E+03  2.4350E+06
375000.E-01  4.0000E+02  1.2652E+06
380000.E-01  0.0000E+00  7.6700E+05
385000.E-01  6.0000E+02  1.5700E+05
390000.E-01  0.0000E+00  4.1400E+04
395000.E-01  2.0000E+02  2.1900E+05
400000.E-01  0.0000E+00  0.0000E+00
405000.E-01  0.0000E+00  0.0000E+00
410000.E-01  0.0000E+00  0.0000E+00
415000.E-01  0.0000E+00  0.0000E+00
420000.E-01  0.0000E+00  0.0000E+00
425000.E-01  0.0000E+00  0.0000E+00
430000.E-01  0.0000E+00  0.0000E+00
435000.E-01  0.0000E+00  0.0000E+00
440000.E-01  0.0000E+00  0.0000E+00
445000.E-01  0.0000E+00  0.0000E+00
450000.E-01  0.0000E+00  0.0000E+00
455000.E-01  0.0000E+00  0.0000E+00
460000.E-01  0.0000E+00  0.0000E+00
465000.E-01  0.0000E+00  0.0000E+00
470000.E-01  0.0000E+00  0.0000E+00
475000.E-01  0.0000E+00  0.0000E+00
480000.E-01  0.0000E+00  0.0000E+00
485000.E-01  0.0000E+00  0.0000E+00
490000.E-01  0.0000E+00  0.0000E+00
495000.E-01  0.0000E+00  0.0000E+00
500000.E-01  0.0000E+00  0.0000E+00
